Battles & Battles Tile sells and installs a great product called TI Proboard that
allows a deck to be tiled with no wood or backer underlayment. The product is
a metal alloy designed to stabilize the surface for a tile installation.

TI Proboard is attached directly to the joists, mortar is applied to the
channelled surface, and waterproofing can be applied to form a “roof” so that the
area under the deck is totally dry. You can even build a room underneath the
deck! After mortaring and applying the optional waterproofing, the deck is ready
to tile.

This deck was waterproofed before the tile was installed.

The posts were attached without punching through the waterproofing layer.

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